发明名称
摘要 <p>Exemplary embodiments of the present invention provide a pattern forming method that secures sufficient alignment accuracy when a pattern is formed by droplet ejection. Exemplary embodiments provide a pattern on a substrate by placing a liquid material including a pattern forming material onto the substrate by droplet ejection, including placement of the liquid material including an alignment mark forming material, onto the substrate by the droplet ejection prior to forming the pattern; and placement of the pattern forming material by making use of a placed alignment mark.</p>
申请公布号 JP4023422(B2) 申请公布日期 2007.12.19
申请号 JP20030320159 申请日期 2003.09.11
申请人 发明人
分类号 G02B5/20;H05K3/10;B05D5/12;B05D7/00;H01L21/00;H05K1/02;H05K3/00;H05K3/12;H05K3/46 主分类号 G02B5/20
代理机构 代理人
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