| 摘要 |
<p>An electronic device for generating an electric oscillating signal is described based on a micro-electromechanical system (MEMS). The electronic device typically comprises a substrate a moveable element which is moveable with respect to the substrate and an actuating means and a sensor. The actuating means is used to induce vibration of the moveable element and comprises two inductive elements, a first one provided fixed to the substrate and a second one provided fixed to the moveable element. The induced vibration of the moveable element is sensed using the sensor and converted into an electric oscillating signal.</p> |
