| 摘要 |
An apparatus/method may comprise, a multi-layer reflecting coating forming an EUV reflective surface which may comprise an inter-diffusion barrier layer which may comprise a carbide selected from the group ZrC and NbC or a boride selected from the group ZrB<SUB>2 </SUB>and NbB<SUB>2 </SUB>or a disilicide selected from the group ZrSi<SUB>2 </SUB>and NbSi<SUB>2 </SUB>or a nitride selected from the group BN, ZrN, NbN, BN, ScN and Si<SUB>3</SUB>N<SUB>4</SUB>. The apparatus and method may comprise an EUV light source collector which may comprise a collecting mirror which may comprise a normal angle of incidence multi-layer reflecting coating; an inter-diffusion barrier layer comprising a material selected from the group comprising a carbide selected from the group ZrC and NbC, or a boride selected from the group ZrB<SUB>2 </SUB>and NbB<SUB>2 </SUB>or a disilicide selected from the group ZrSi<SUB>2 </SUB>and NbSi<SUB>2 </SUB>a nitride selected from the group BN, ZrN, NbN, BN, ScN and Si<SUB>3</SUB>N<SUB>4</SUB>.
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