SUBSTRATE PICK-UP UNIT FOR CASSETTE, SUBSTRATE KEEPING SYSTEM AND LOADING/UNLOADING METHOD USING THE SAME

摘要

A substrate pickup unit for a cassette is provided to stably load/unload a substrate by avoiding collision of a robot and a substrate. The inlet surface(112) of the front of a cassette(110) is opened and a support platform(114) is formed along the inner surface of the cassette. The edge of a substrate(2) except the front end of the substrate confronting the inlet surface is placed on the support platform to support the substrate in the cassette used in loading/unloading the substrate. At least one finger(150) lifts up the front end of the substrate in the cassette in the loading/unloading process. A horizontal lift frame can cross the front of the inlet surface, capable of moving up/down. The finger can be mounted on the horizontal lift frame.