FABRICATION METHOD OF MICRO-OPTICAL ELEMENTS USING PHOTOIMAGEABLE HYBRID MATERIALS

摘要

A method for manufacturing a micro optical device using a photo imageable hybrid material is provided to form a micro optical device including a required structure shape by irradiating light to a photo-lithography hybrid coating layer. A photo-lithography hybrid coating layer is formed on a substrate(1). The photo-lithography hybrid coating layer comprises an oligosiloxane having an organic functional group capable of being polymerized, a light sensitive monomer capable of forming a polymer, or a photochemistry initiation monomer which starts polymerization by forming a heterogeneous element, or the photosensitive monomer and the photochemistry initiation monomer. A micro optical device having a required structure shape is formed by irradiating a light to the photo-lithography hybrid coating layer.