| 发明名称 |
Cyanoadamantyl compounds and polymers |
| 摘要 |
Cyanoadamantyl compounds, polymers that comprise polymerized units of such compounds, and photoresist compositions that comprise such polymers are provided. Preferred polymers of the invention are employed in photoresists imaged at wavelengths less than 250 nm such as 248 nm and 193 nm.
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| 申请公布号 |
US7309750(B2) |
申请公布日期 |
2007.12.18 |
| 申请号 |
US20050075545 |
申请日期 |
2005.03.08 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
BAE YOUNG C.;KAVANAGH ROBERT J. |
| 分类号 |
C08F10/00;C07C255/31;C07C255/47;C08F20/34;C08F220/34;G03C1/492;G03F7/004;G03F7/039 |
主分类号 |
C08F10/00 |
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