发明名称 |
Sample probability of fault function determination using critical defect size map |
摘要 |
Methods, systems and program products for determining a probability of fault (POF) function using critical defect size maps. Methods for an exact or a sample POF function are provided. Critical area determinations can also be supplied based on the exact or sample POF functions. The invention provides a less computationally complex and storage-intensive methodology. |
申请公布号 |
US7310788(B2) |
申请公布日期 |
2007.12.18 |
申请号 |
US20050906549 |
申请日期 |
2005.02.24 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ALLEN ROBERT J.;TAN MERVYN Y. |
分类号 |
G06F17/50;G06F17/10 |
主分类号 |
G06F17/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|