DENTING AND CRACK INSPECTING APPARATUS

摘要

A denting and crack inspection apparatus is provided to reduce a variety of losses due to the down-scaling of a work space and to reduce tact time. A stage(20) is loaded with a substrate subject to dent and crack inspection for a tab area attached thereto. At least one dent inspection camera(40) photographs the tab area in order to test dent of the tab. At least one crack inspection camera(50) photographs the tab area in order to test crack of the substrate with respect to the tab area. An optical system moving part(30) supports the dent inspection camera and the crack inspection camera such that the cameras can move on the stage.