| 摘要 |
A horizontal rotating movement type semiconductor material handling apparatus and a test apparatus comprising the same are provided to lessen a height limitation by thinning a hand assembly structure, and to reduce an instrument interference by rotating the hand assembly. A robot arm(115) is rotated horizontally between the arms which are interconnected each other. A vertical driving part(111) drives the robot arm vertically by connecting to one side of the robot arm. A plurality of picker installation parts of a frame part(121) are connected to the other side of the robot arm, and rotated horizontally. A picker(127) for picking a semiconductor substance is installed in the picker installation part.
|
