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发明名称
对浸没液体为疏溶的入射表面和光学窗
摘要
本发明提供用以让光(例如深UV(DUV)光)透射过去的光学窗。一示范性光学窗包含一可让该光的至少一波长透射过去的窗基板。该窗基板具有一装饰着复数个次波长粗糙体的入射表面,该等粗糙体会被排列成用以让该入射表面疏溶于会让该光透射过去的液体。该次波长粗糙体排列可被配置成用以让该入射表面超疏溶于该会让光透射过去的液体。该等次波长粗糙体可具有任何各种形状及它们的组合,并且可以规律或不规律的方式来排列。
申请公布号
TW200745778
申请公布日期
2007.12.16
申请号
TW096111557
申请日期
2007.04.02
申请人
尼康股份有限公司
发明人
麦可R 索盖德
分类号
G03F7/20(2006.01);H01L21/027(2006.01)
主分类号
G03F7/20(2006.01)
代理机构
代理人
桂齐恒;阎启泰
主权项
地址
日本
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