2.5 DIMENSIONAL MICROSCOPE SYSTEM USING OFF-AXIS APERTURE

摘要

A 2.5D microscope system is provided to effectively obtain 3D information of a sample by inserting an off-axis stop to a conventional microscope system. A 2.5D microscope system includes a mount(6), an objective lens(5), an eye lens(8), a CCD(Charge Coupled Device) camera(2) and an off-axis stop. The mount supports a sample(9). The objective lens is used to observe the sample on the mount. The eye lens and the CCD camera receive light from the sample through a beam splitter(3). The light from the sample passes by the objective lens. The off-axis stop is applied between the objective lens and the beam splitter and receives the light from the sample. A hole is formed on the off-axis stop, which is arranged on the objective lens and derailed from an optical axis.