| 发明名称 |
PURIFICATION OF NITROGEN TRIFLUORIDE |
| 摘要 |
A process and system for adsorption purification of NF3 wherein a crude product containing NF3 and impurities such as CF4 is brought into contact with a polyacrylonitrile-based carbon molecular sieve so that at least a portion of one or more impurities are adsorbed by the sieve without a significant adsorption of the NF3.
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| 申请公布号 |
KR20070116258(A) |
申请公布日期 |
2007.12.07 |
| 申请号 |
KR20077023913 |
申请日期 |
2007.10.18 |
| 申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
SINGH RAJIV R.;ORLOWSKI DAVID F.;LULY MATTHEW H.;PAONESSA MARTIN R. |
| 分类号 |
C01B21/083;C01B21/04 |
主分类号 |
C01B21/083 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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