DEVICE FOR CLEANING PHOTO MASK BY DRY TYPE AND METHOD TO CLEAN PHOTO MASK BY DRY TYPE

摘要

An apparatus and a method for dry-cleaning a photomask are provided to prevent generation of haze by dry-cleaning the photomask, thereby improving a cleaning and recycling efficiency. A loading member(100) is installed in a chamber(900) to load and support a photomask(M). A spraying member(200) sprays sublimation solid particles onto the entire surface of the photomask loaded on the loading member in the chamber to dry-clean a surface of the photomask. The loading member and the spraying member are relatively moved by using a driving member. The driving member has a first driving member(310) reciprocating the spraying member and a second driving member(320) moving the loading member in a front direction.