| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the efficiency of atmospheric-pressure plasma processing without installing an extra apparatus by maintaining a gas atmosphere nearby plasma processors. <P>SOLUTION: The apparatus includes the plasma processors 5a and 5b which plasma-process a work 1, a conveying mechanism 2 which moves the plasma processors 5a and 5b relatively to the work 1, and gas curtain mechanisms 3a and 3b, and 3c and 3d provided on work entrance sides and work exit sides of the plasma processors 5a and 5b, respectively. At least, the gas curtain mechanisms 3a and 3b are blown out on the entrance sides for the work 1 blow out gas capable of heating the work 1. <P>COPYRIGHT: (C)2008,JPO&INPIT |
