ACTIVELY HEATED ALUMINUM BAFFLE COMPONENT HAVING IMPROVED PARTICLE PERFORMANCE AND METHODS OF USE AND MANUFACTURE THEREOF

摘要

An actively heated aluminum baffle component such as a thermal control plate (101) or baffle ring (120) of a showerhead electrode assembly (100) of a plasma processing chamber has an exposed outer aluminum oxide layer which is formed by an electropolishing procedure. The exposed outer aluminum oxide layer minimizes defects and particles generated as a result of differential thermal stresses experienced by the aluminum component and outer aluminum oxide layer dupng plasma processing compared to an identically shaped component having a Type III anodized surface.