UNEVENNESS INSPECTING METHOD, UNEVENNESS INSPECTING APPARATUS, AND RECORDING MEDIUM

摘要

An unevenness inspecting method and apparatus, and a recording medium are provided to detect a stripe formed over plural sections of a substrate easily. A plurality of rectangular areas having the same pattern is horizontally and vertically arranged at predetermined intervals. The stripe of a substrate is detected along the surfaces of the rectangular area. A multi-gray scale original image is obtained by photographing the substrate(S111). A target image is prepared by using a portion of the original image corresponding to the interval as a mask(S114). The target image is converted into a binary image, and it is determined whether the ratio of the height and the width of the binary image exceeds a predetermined value. A plurality of closed areas of the binary image having a ratio exceeding the predetermined value is defined as stripe areas. Two of the stripe areas corresponding to a predetermined condition are detected from the closed areas(S116).