SEMICONDUCTOR TEST SYSTEM

摘要

A semiconductor testing system is provided to maintain the accuracy of defect detection with respect to a semiconductor device and to reduce a testing time by employing a detection determining unit and a test item deleting unit. A test item managing unit(9) manages a plurality of test items when a test for a semiconductor device is performed. A test performing unit(11) performs a test for the semiconductor device according to the test items. A detection determining unit(21) determines whether a specific defect to be detected by a specific test item of the test items is detected by another test item of the test items, based on the test result of the test performing unit. In case the detection determining unit determines that the specific defect is to be detected by the another test item, a test item deleting unit(13) deletes the specific test item from the test items managed by the test item managing unit.