| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor that can increase the response speed and suppress reduction in the light reception efficiency and in the sensitivity of a temperature-detecting part. SOLUTION: This infrared sensor includes a base substrate 1, a temperature-detecting part 3 for absorbing infrared rays and detecting a temperature change due to absorption, an insulation part 4 for thermally insulating the temperature-detecting part 3 from the base substrate 1 by supporting the temperature-detecting part 3 so that the temperature detecting part 3 is separately arranged from one surface of the base substrate 1, and a light-receiving lens 20 arranged on the opposite side to the base substrate 1 side in the temperature-detecting part 3. The temperature-detecting part 3 has temperature-detecting elements 3a, formed of sensing elements of a plurality of bolometer shapes, where the sensing elements are arranged in a two-dimensional array shape, on a plane orthogonal to the thickness direction of the base substrate 1. All the temperature-detecting elements 3a are interconnected in series. The light-receiving lens 20 has a plurality of lens small-bodies 21, arranged in a two-dimensional array shape so as to make infrared rays converge to each of the temperature detecting elements 3a. COPYRIGHT: (C)2008,JPO&INPIT
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