| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device for performing transition of an inspection pattern at a high-speed while preventing an erroneous operation due to drop in voltage. SOLUTION: The semiconductor device includes: an inspection pattern generation part generating the inspection pattern to be input to a logic circuit to be inspected; a scan chain by which an input of the inspection pattern generated by the inspection pattern generation part to the logic circuit transits; a PLL part outputting a clock signal; and an inspection clock output control part performing the control so that a first clock signal to be supplied to the inspection pattern generation part is supplied from an external apparatus in a first state in which initial setting of inspection of the logic circuit is performed and a second clock signal to be supplied to the scan chain is supplied from the PLL part in a second state in which the inspection pattern generated in the first state is transmitted to the scan chain. The PLL part includes a VCO part having an oscillation frequency varied according to a voltage level of a control signal input from an external apparatus. The clock frequency of the clock signal output from the PLL part varies according to the oscillation frequency. COPYRIGHT: (C)2008,JPO&INPIT
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