发明名称 THREE-DIMENSIONAL DISPLACEMENT MEASURING DEVICE AND MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a measuring device and a measuring method capable of measuring highly-accurate omnidirectional displacement inexpensively with a simple mechanism. SOLUTION: This three-dimensional displacement measuring device is characterized by having a prescribed matrix pattern 20 applied onto the surface of a measuring object 1, and a pair of image side telecentric optical systems having each main optical axis facing to the matrix pattern 20. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007315865(A) 申请公布日期 2007.12.06
申请号 JP20060144292 申请日期 2006.05.24
申请人 CANON MACHINERY INC 发明人 KOTO ATSUSHI;YAMAMOTO TAKAKO
分类号 G01B11/00 主分类号 G01B11/00
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