| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring a dimensional position in image processing wherein measurement of the dimensional position of an object can be highly precisely and inexpensively carried out by correcting an optical aberration. SOLUTION: A scale 200 with a plurality of inspection patterns 201 arranged side by side is photographed by a photographing means to make one of the inspection patterns 201 to be the center of an image 110. By passing the image 110 through image processing, with the inspection pattern 201 in the center of the image 110 being made a reference pattern 201a, each position of the inspection pattern 201 based on the reference pattern 201a is measured, thereby acquiring image position data. At the same time, the optical aberration of an optical system at the image position is acquired on the basis of the image position data and reference position data as position data of each inspection pattern 201 based on the actual reference pattern 201a of the scale 200. The dimensional position by image processing of the object is corrected on the basis of the optical aberration. COPYRIGHT: (C)2008,JPO&INPIT
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