| 摘要 |
There is provided a magnetic head where a heater is reliably incorporated into the magnetic head and the fly height of the magnetic head above a medium surface can be reliably controlled using thermal expansion due to heat from the heater. A method of manufacturing the magnetic head is also provided. The method of manufacturing includes, as steps of manufacturing the heater, a step of forming a silicon dioxide layer on the surface of a substrate, a step of forming, as heater forming layers, a tantalum layer, a heating layer, and another tantalum layer in that order on the surface of the silicon dioxide layer, a step of patterning a resist in accordance with a planar pattern of the heater to cover the surface of the heater forming layers, a step of forming the heater in a pattern by carrying out ion milling on the heater forming layers with the resist as a mask, a step of sputtering a silicon dioxide layer with a greater thickness than a thickness of the heater in a state where the surface of the heater has been covered with the resist, and a step of removing the resist together with the silicon dioxide layer that covers an outer surface of the resist from the surface of the heater by lifting off.
|
