| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inertial sensor capable of securing both the effect of suppressing leakage oscillations of a detection element and impact resistance to external impact oscillations and achieving compactness. <P>SOLUTION: The detection element 8 is supported at a flexible resin substrate 7. The natural frequency of the flexible resin substrate 7 in a state supporting the detection element 8 lies within a range larger than the frequency difference between the natural frequency of the detection element 8 in a driving direction and its natural frequency in a detection direction and smaller than a minimum frequency excited in the detection element 8 by external oscillations. <P>COPYRIGHT: (C)2008,JPO&INPIT |
