| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a piezoelectric layer formed of sodium potassium niobate. <P>SOLUTION: The method for producing the piezoelectric layer includes a process for forming the material layer 2 of the piezoelectric layer, formed of sodium potassium niobate, on a substrate 1, a process for introducing a raw material gas containing steam and oxygen gas into an oxidizing gas production part, and a process for oxidizing the material layer by heating gas in the oxidizing gas production part and feeding the heated gas into an oxidation furnace. By this method for producing the piezoelectric layer, the piezoelectric layer formed of sodium potassium niobate can be formed at a low temperature in comparison with the conventional method for producing the piezoelectric layer. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
