| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of an optical element, capable of inspecting the state of transmission surface and reflection surface of light of the optical element with the same wavelength as in the state of an electronic apparatus for mounting the optical element. SOLUTION: In the inspection method of a prism 50, a laser beam of the same wavelength as the laser beam used in the electronic apparatus mounting the prism 50 is radiated from a light source 20 or a light source 60, light quantity of the reflected light or transmitted light obtained by irradiating the surface of the prism 50 with the laser beam is detected by a photodetector 100, and the quality of the surface state of the transmission surface (planes X, Y and U) and reflection surface (slope Z) is determined, based on the difference between the light quantity detected by the photodetector 100 and reference light quantity. This inspection method is effective, especially at detecting fogging of the prism 50. COPYRIGHT: (C)2008,JPO&INPIT
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