COORDINATE CORRECTION METHOD AND OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of correcting coordinates so that a test piece may enter in the observation field promptly and certainly in an observation device to observe the test piece by moving a test-piece stage to a specified coordinate. SOLUTION: This is the observation device to observe a test piece by moving a test-piece stage to a coordinate calculated beforehand by an inspection device. The observation device has a function to hold a plurality of coordinate correction tables to correct the slippage of the coordinate values calculated beforehand by the inspection device and the real test-piece positions detected by the observation device, and by evaluating the correction accuracy of the plurality of coordinate correction tables, the coordinate correction table having the maximum evaluation value is applied. COPYRIGHT: (C)2008,JPO&INPIT