| 摘要 |
PROBLEM TO BE SOLVED: To provide an omega energy filter with (n-1) pieces of electron beam detectors arranged against n pieces of magnetic poles so that they do not hinder an orbit of electron beams. SOLUTION: The omega energy filter structured of a plurality of fan-shaped magnetic poles 32, with electron-beam orbits bent by respective magnetic poles, and so made to form an omega version orbit, includes electron beam detectors 33 detecting electron beams provided in a tangential direction of the orbit of each magnetic pole 32, an aperture 25 passing the electron beams only when they take an ideal orbit, and are so structured that the electron beams passing the aperture 25 may reach the electron beam detectors 33. COPYRIGHT: (C)2008,JPO&INPIT
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