METHOD FOR MANUFACTURING CARBON FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon film having excellent adhesiveness to a base material and excellent peeling resistance, wear resistance and low friction property in an industrially favorable manner by an intermediate layer provided in a simple and inexpensive process. SOLUTION: In the method for manufacturing a carbon film provided on a metallic base material via an intermediate layer having the concentration gradient so that the metallic component concentration is higher toward the metallic base material side and the non-metallic component concentration is higher toward the carbon film side, the intermediate layer is prepared by the combination of a physical vapor deposition method with a chemical vapor deposition method. COPYRIGHT: (C)2008,JPO&INPIT