| 摘要 |
A manufacturing method of an MR element in which current flows in a direction perpendicular to layer planes, includes a step of forming on a lower electrode layer an MR multi-layered film having a cap layer at a top thereof, a step of forming a mask on the cap layer of the MR multi-layered film, a step of patterning the MR multi-layered film by milling through the mask to form an MR multi-layered structure, a step of forming a magnetic domain control bias layer by using a lift off method using the mask, a step of, after forming the magnetic domain control bias layer, forming an additional cap layer on the cap layer and a part of the magnetic domain control bias layer, a step of planarizing a top surface of the additional cap layer and the magnetic domain control bias layer, and a step of forming an upper electrode layer on the planarized top surface.
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