发明名称 ALIGNMENT FILM INSPECTION APPARATUS AND FABRICATION EQUIPMENT FOR LIQUID CRYSTAL DISPLAY COMPRISING THE SAME
摘要 An apparatus for inspecting an alignment layer and LCD fabrication equipment including the same are provided to detect a defect of an alignment layer and analyze a cause of the defect of the alignment layer at the same time by providing a microscope, and at least one solvent supply unit in the apparatus for injecting the alignment layer. A transfer line(200) transfers a substrate on which an alignment layer is printed. An inspection line(400) diverges from the transfer line. An alignment layer inspecting apparatus(500) is disposed on the test line. The alignment layer inspecting apparatus includes a microscope for detecting a defect of the alignment layer applied on the substrate, and at least one solvent supply unit which is disposed adjacent to the microscope and providing a solvent onto the substrate. The solvent supply unit supplies the solvent to a substrate area observed by the microscope.
申请公布号 KR20070115429(A) 申请公布日期 2007.12.06
申请号 KR20060049854 申请日期 2006.06.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, YOUNG GU;AHN, HYUN KU;KIM, JIN WHAL
分类号 G02F1/1337 主分类号 G02F1/1337
代理机构 代理人
主权项
地址