发明名称 DEVICE FOR SUPPLYING ORGANIC METAL COMPOUND
摘要 <p>Disclosed is a supply device comprising two columnar containers (1, 1') and a communicating tube (5) for connecting the insides of the containers (1, 1') with each other at the lower ends. The containers (1, 1') are filled with an organic metal compound which is in a solid state at room temperature. The upper portion of the container (1) is provided with a gas feed tube (2) for introducing a carrier gas into the container (1). The upper portion of the container (1') is provided with a gas discharge tube (3) for discharging the carrier gas containing the organic metal compound.</p>
申请公布号 WO2007139159(A1) 申请公布日期 2007.12.06
申请号 WO2007JP61005 申请日期 2007.05.30
申请人 UBE INDUSTRIES, LTD.;NOGUCHI, HIDEKI;ISHIJI, KOUJI;HIRATSUKA, TOORU;YAKUSHIJIN, HIROTAKA;MATSUSHIGE, KENJI;YOSHITOMI, SUSUMU 发明人 NOGUCHI, HIDEKI;ISHIJI, KOUJI;HIRATSUKA, TOORU;YAKUSHIJIN, HIROTAKA;MATSUSHIGE, KENJI;YOSHITOMI, SUSUMU
分类号 B65G53/22;B01J4/00;C23C16/448;H01L21/205 主分类号 B65G53/22
代理机构 代理人
主权项
地址