发明名称 ENCODER
摘要 <p>An interval of incident places of -1st diffraction light, 0-th light, and +1st&lt;SUP/&gt;diffraction light is set to be three times (3p) a bit pattern pitch of a track (31). The incident place of the 0-th light and the ±1st diffraction light become to vibrate in an X-axis direction by a rotating vibration of a vibrating mirror (14) by a driving device while the interval of the incident place is maintained with each other. An amplitude (half amplitude) of the vibration is set to be equal to a pitch (p) of the bit pattern. The incident places of the 0-th light and ±1st diffraction light move between regions corresponding to three bits with an equal interval, respectively. Thus, 9-bit absolute position information can be read out by using three diffracting light.</p>
申请公布号 WO2007138869(A1) 申请公布日期 2007.12.06
申请号 WO2007JP60117 申请日期 2007.05.17
申请人 NIKON CORPORATION;SENDAI NIKON CORPORATION;WATANABE, AKIHIRO;IMAI, TORU 发明人 WATANABE, AKIHIRO;IMAI, TORU
分类号 G01D5/36;G01D5/38 主分类号 G01D5/36
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