EXPOSURE DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

liquid-immersion space forming member (70) for forming a liquid immersion space by filling an optical path space (K1) of exposure light (EL) with a first liquid (LQ); and a temperature regulating mechanism (60) for suppressing the temperature change of the liquid-immersion space forming member (70) accompanying the release of formation of the liquid immersion space.