| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning optical microscope such as an LSM which employs a wave front converting element, has little off-axis performance deterioration. SOLUTION: The scanning optical microscope is equipped with a light source 11, the wave front converting element 22 which optionally converts the wave front of the illumination light emitted by the light source 11, a luminous flux scanning means 3 which makes a scan with the wave front-converted illumination light from the wave front converting element 22 in mutually orthogonal directions, an objective lens 4 which converges the illumination light whose direction is changed by the luminous flux scanning means 3 to form a light spot, and a detector 53 which detects signal light emitted by a preparation; and the light spot is moved along the optical axis direction of the objective lens by converting the wave front with the wave front converting element. The wavefront conversions are performed a plurality of times at a prescribed position of the light spot and the image of the preparation is obtained in accordance with the wavefront conversions. COPYRIGHT: (C)2008,JPO&INPIT
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