| 摘要 |
A piezoelectric actuator includes individual inner-electrodes arranged between stacked ceramic sheets, individual surface-electrodes arranged in a row in a row-direction on a top surface of the stacked ceramic sheets, and connection electrodes connecting the individual inner-electrodes and the individual surface-electrodes respectively. The connection electrodes each have a size enough to cover one of the individual surface-electrodes respectively. The individual surface-electrodes and the connection electrodes are connected to each other via inner conduction electrodes filled through holes which are located at mutually different positions in a direction orthogonal to the row-direction of the individual surface-electrodes. With this, it is possible to make the contour of the piezoelectric actuator to be small, and to suppress the arching deformation or warpage of the piezoelectric actuator.
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