发明名称 A METHOD FOR MANUFACTURING A DEVICE USING IMPRINT LITHOGRAPHY AND DIRECT WRITE TECHNOLOGY
摘要 The present invention provides a method for manufacturing, as well as a method for manufacturing an integrated circuit. The method for manufacturing, among others, may include forming one or more devices of a first type over a substrate using imprint lithography, and forming one or more devices of a second type over the substrate using a direct write technology.
申请公布号 KR20070116135(A) 申请公布日期 2007.12.06
申请号 KR20077024192 申请日期 2006.03.23
申请人 AGERE SYSTEMS INC. 发明人 BRAUN CHRISTOPHER P.;CHITTIPEDDI SAILESH;PEIFFER FREDERICK R.
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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