Piezoelectric sensor arrangement for use in movable measuring system, has acoustic resonator designed by thin layer resonator, where piezoelectric layer of layer resonator is epitaxially manufactured such that modes are activated

摘要

#CMT# #/CMT# The arrangement (100) has an acoustic resonator with a sensitive area arranged such that a resonant frequency of the arrangement changes in dependent of characteristics of a measuring medium (101) e.g. liquid such as water, measuring medium. The acoustic resonator is designed by a piezoelectric thin layer resonator, and a piezoelectric layer (3) of the thin layer resonator is epitaxially manufactured such that transverse polarized oscillation modes are activated. The piezoelectric layer is manufactured by a metal-organic gaseous phase epitaxy. The piezoelectric layer is made of nitride. #CMT#USE : #/CMT# Used in a movable measuring system for detecting elastic characteristics of a measuring medium e.g. liquid such as water, blood and mineral oil, measuring medium, or presence and/or concentration of an analyte molecule in the measuring medium, for process-technological and medical-chemical-biological applications, and for a viscosity sensor in a motor vehicle. #CMT#ADVANTAGE : #/CMT# The arrangement is manufactured in a simple and economical manner with increased sensitivity and reproductibility. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic representation of a piezoelectric sensor arrangement. 100 : Piezoelectric sensor arrangement 101 : Measuring medium 1 : Substrate 2 : Carrier membrane 3 : Piezoelectric layer #CMT#INORGANIC CHEMISTRY : #/CMT# The piezoelectric layer is made of aluminum-gallium nitride and aluminum nitride.