发明名称 |
PLASMA CVD METHOD, METHOD FOR FORMING SILICON NITRIDE FILM, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA CVD METHOD |
摘要 |
<p>A plasma processing apparatus is provided with a process chamber which can be vacuumized; a placing table for placing a subject to be processed in the processing chamber; a microwave generating source for generating microwaves; a planar antenna, which has a plurality of slots and introduces the microwaves generated by the microwave generating source into the process chamber through the slots; a gas supply mechanism for supplying a film forming material gas into the process chamber; and a high-frequency power supply for supplying the placing table with high-frequency power. By using such plasma processing apparatus, a nitrogen containing gas and a silicon containing gas introduced into the process chamber are brought into the plasma state, and at the time of depositing a silicon nitride film on the surface of the substrate by the plasma, the placing table is supplied with high-frequency power.</p> |
申请公布号 |
WO2007139142(A1) |
申请公布日期 |
2007.12.06 |
申请号 |
WO2007JP60976 |
申请日期 |
2007.05.30 |
申请人 |
TOKYO ELECTRON LIMITED;KOHNO, MASAYUKI;NISHITA, TATSUO;NAKANISHI, TOSHIO |
发明人 |
KOHNO, MASAYUKI;NISHITA, TATSUO;NAKANISHI, TOSHIO |
分类号 |
H01L21/31;C23C16/34;C23C16/511;H01L21/318;H01L21/8247;H01L27/115;H01L29/78;H01L29/788;H01L29/792 |
主分类号 |
H01L21/31 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|