| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film which is free from lead and excellent in piezoelectric characteristics. <P>SOLUTION: The piezoelectric thin film 1 is formed on an electrode layer 12 and composed of a first alkali niobium oxide film 2 represented by formula, (Na<SB>x</SB>K<SB>y</SB>)NbO<SB>3</SB>(0<x<1, 0<y<1, x+y=1), and a second alkali niobium oxide film 3 which is formed on the first alkali niobium oxide film 2 and represented by formula, (Na<SB>x</SB>K<SB>y</SB>Li<SB>z</SB>)NbO<SB>3</SB>(0<x<1, 0<y<1, 0<z<1, x+y+z=1). <P>COPYRIGHT: (C)2008,JPO&INPIT |
