| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor capable of enhancing sensitivity and heightening response speed, with a configuration wherein temperature detection parts are arranged in a two-dimensional array shape. SOLUTION: The sensor includes a base substrate 1; a plurality of temperature detection parts 3 arrayed in the two-dimensional array shape on one surface side of the base substrate 1, for absorbing an infrared ray and detecting a temperature change caused by absorption; a plurality of heat insulating parts 4 for supporting each temperature detection part 3, respectively, so that each temperature detection part 3 is arranged separately from one surface of the base substrate 1, and performing heat insulation between each temperature detection part 3 and the base substrate 1; and a sealing member 20 enclosing each temperature detection part 3 and each heat insulating part 4 on one surface side of the base substrate 1, and forming an airtight space 15 between itself and the base substrate 1. Each heat insulating part 4 is formed of a porous silicon oxide which is a porous material. COPYRIGHT: (C)2008,JPO&INPIT
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