IMAGE RESOLUTION PERFORMANCE SETTING DEVICE, INSPECTION DEVICE, IMAGE RESOLUTION PERFORMANCE SETTING METHOD, IMAGE RESOLUTION PERFORMANCE SETTING PROGRAM AND COMPUTER READABLE RECORDING MEDIUM

摘要

An inspection device capable of inspecting defects with high accuracy and low cost is provided. An image resolution performance setting unit (11) is comprised of a target image resolution scope calculating unit (11a) for calculating a target image resolution scope in accordance with a pixel pitch, an upper limit value of differences between an image resolution of an image pickup element and the pixel pitch, and an upper limit value of the number of pixels contained in one moiré period; and an image resolution comparing unit (11c) for judging whether an image resolution of an image pickup element is in the target image resolution scope, so that a judged image resolution is regarded as the image resolution of the image pickup element in the case that the judged image resolution is in the target image resolution scope.