A METHOD FOR FORMING ADDRESSING LINES IN A MEMS MIRROR ARRAY

摘要

A method for forming addressing lines in a MEMS mirror array is provided to improve fill-factor of the MEMS mirror array by reducing a dead area due to the addressing lines. A method for forming addressing lines in a MEMS(Micro-Electro-Mechanical System) mirror array includes the steps of: preparing a space to arrange the addressing lines by etching a substrate under the MEMS mirror array; arranging the addressing lines to be bonded with a driving electrode of a specific MEMS mirror cell to protrude on a board and the addressing lines to be bonded with a driving electrode of the other MEMS mirror cell to pass under the specific MEMS mirror cell in the prepared space; and bonding the driving electrode of each MEMS mirror cell forming the MEMS mirror array with the corresponding addressing line.