| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a foreign matter removing device that can efficiently remove foreign matters. <P>SOLUTION: The foreign matter removing device 10 comprises a foreign matter detecting device 14 that irradiates the surface of a reticle 51 with laser light to detect the foreign matter 12, a blowing device 16 that sprays compressed air to the surface of the reticle 51 to blow off the foreign matter 12, and an exhaust fan 18 that discharges the blown foreign matter 12 to the outside through a discharge port 11a. When foreign matter 12 is present on the surface of the reticle 51, scattered light enters an image sensor to detect the foreign matter 12. If the foreign matter 12 is larger than a threshold, a controller 29 drives a pump 38, a rocking device 40 and the exhaust fan 18 to spray compressed air onto the reticle 51 and to discharge the blown foreign matter 12 through the discharge port 11a. If the foreign matter 12 is smaller than the threshold, an image of the foreign matter 12 displayed on an LCD 34 is observed; and when the foreign matter 12 is protruding over the line of a circuit pattern, compressed air is sprayed onto the reticle 51. <P>COPYRIGHT: (C)2008,JPO&INPIT |
