| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier and a substrate transfer method, with which a substrate can more speedily be transferred from a first substrate storage to a second substrate storage, and to improve throughput. SOLUTION: In the substrate carrier 50, respective forks 54a and 54b are arranged so that they are separated by a fork pitch P3 previously set in a vertical direction. When the respective forks 54a (54b) take out the substrate from the first substrate storage 20, the forks 54a (54b) raise the substrate and support it by moving upward from a pre-take-out position under the substrate by a previously set take-out stroke amount ST1. The fork pitch P3 is set in a total size of a first pitch P1 and the take-out stroke amount ST1 of a plurality of substrates stored in the first substrate storage 20. COPYRIGHT: (C)2008,JPO&INPIT
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