| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor capable of enhancing sensitivity and heightening response speed. SOLUTION: The sensor includes a sensor body 10 having a rectangular plate-shaped base substrate 1; a temperature detection part 3 arranged on one surface side (the upper surface side in figure 1(a)) of the base substrate 1, for absorbing an infrared ray and detecting a temperature change caused by absorption; and a heat insulating part 4 for supporting the temperature detection part 3 so that the temperature detection part 3 is arranged separately from one surface of the base substrate 1, and performing heat insulation between the temperature detection part 3 and the base substrate 1. The heat insulating part 4 is formed of a porous silicon oxide which is a porous material. The sensor also includes a sealing member 20 forming an airtight space 15 storing the temperature detection part 3, the heat insulating part 4 or the like on one surface side of the base substrate 1, between itself and the base substrate 1. COPYRIGHT: (C)2008,JPO&INPIT
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