发明名称 DRY ADHESION BONDING
摘要 Methods for bonding include deposition of an adhesion layer on at least one substrate using chemical vapor deposition. The two adhesion layers each have a reactive group that is complementary to the other, thus enabling strong adhesion between the bonded substrates. Devices include two substrates that can be adhered together by chemically depositing an adhesion layer on at least one substrate using chemical vapor deposition. The substrates each have a reactive group that is complementary to the other, thus enabling strong adhesion between the bonded substrates.
申请公布号 US2007281126(A1) 申请公布日期 2007.12.06
申请号 US20070756890 申请日期 2007.06.01
申请人 THE REGENTS OF THE UNIVERSITY OF MICHIGAN 发明人 LAHANN JOERG;CHEN HSIEN-YEH
分类号 B32B5/00 主分类号 B32B5/00
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