| 摘要 |
An apparatus for manufacturing a flat display device is provided to by previously charging nitrogen gas having a purge amount in a nitrogen gas auxiliary tank during a vacuum process to reduce the process time during process exchange. A substrate is loaded on a substrate stage(400). A controller(300) is connected to the substrate stage, wherein the controller controls the auto-charging of nitrogen gas through vacuum when the substrate is loaded on the substrate stage. A vacuum line(200) is connected to the controller. A nitrogen gas auxiliary tank(120) is connected to the controller, wherein the nitrogen auxiliary tank stores the auto-charged nitrogen gas. A nitrogen gas line(100) is connected to the controller, wherein nitrogen gas line supplies nitrogen gas to separate the substrate from the substrate stage. |
