| 摘要 |
PROBLEM TO BE SOLVED: To provide a photometric device that is superior in the measurement accuracy of light in the ultraviolet region, especially a far-ultraviolet/vacuum ultraviolet region, and to provide a photometric method. SOLUTION: The light energy, when there is no sample in the optical path from a light source 11 to a light detection part 22 and the light energy, when the sample 23 is put in the optical path are measured, and is subsequently compared with each other to perform measurements for calculating the transmittance, the absorptivity or the reflectivity of the sample. At this time, the deviation in the optical axes when the sample 23 is present and absent in the optical path is calculated, on the basis of the material quality and shape of the sample and the arrangement state, when the sample is arranged in the optical path. Then, the light detecting part 22 is moved, on the basis of the calculation result and luminous fluxes at the time, when the sample is present and when it is absent in the optical path are detected by the same part of the light detecting part. COPYRIGHT: (C)2008,JPO&INPIT
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