| 摘要 |
By determining a metric for tool utilization in a manufacturing environment on the basis of tool-specific characteristics and a probability distribution for the transport capability of an automated material handling system, the influence of the transport system on the tool performance may be effectively determined. For this purpose, an average delay caused by the automated material handling system may be iteratively calculated on the basis of a respective required carrier exchange time, which depends on tool- and process-specific characteristics. From the corresponding average delay, an appropriate metric, such as a utilization loss factor, may be determined.
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