发明名称 DEVICE FOR PREVENTING CLEANING SOLUTION LEAK IN WET STATION
摘要 A device for preventing leak of cleaning solution of wet cleaning equipment is provided to secure stability of a driving motor and to improve cleanliness of a clean room by preventing leak of the cleaning solution. One end protruded to the outside through an external wall(310) of a bath(B) is joined to a rotation driving source(400), to supply a rotation driving power to a driving shaft(300). A removal member(100) is installed on an axis line of the driving shaft, to exhaust forcibly the cleaning solution leaked to the outside of the bath along the driving shaft by spraying dry air.
申请公布号 KR20070115310(A) 申请公布日期 2007.12.06
申请号 KR20060049530 申请日期 2006.06.01
申请人 K.C.TECH CO., LTD. 发明人 CHEONG, YIL YOUNG
分类号 H01L21/304 主分类号 H01L21/304
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